AMAT Applied Materials 0010-09035节气阀

1.产 品 资 料 介 绍：

产品概述

AMAT 0010-09035 节气阀是 Applied Materials 半导体设备中的关键流体控制元件，用于调节工艺气体或真空系统中的流量和压力。该阀门可根据控制器信号精确调节开度，实现流量的连续控制，从而优化沉积（CVD/PVD）、刻蚀（Etch）或其他真空工艺的工艺条件，是保证工艺稳定性和设备安全的重要组成部分。

技术参数（典型特征）

• 类型：节气阀 / Throttle Valve

• 功能：调节气体或真空流量与压力，实现精确控制

• 控制方式：电气或气动控制，可与控制器实现闭环调节

• 接口类型：标准法兰或管路接口，适配工艺气体或真空系统

• 工作环境：洁净室兼容，耐腐蚀、耐高温

• 适用介质：工艺气体（如N₂、Ar、SiH₄等）及真空系统气体

• 兼容设备：Applied Materials 各类沉积、刻蚀及真空工艺设备

应用场景

1. 工艺流量调节

   • 精确控制工艺气体或真空系统流量，保证工艺稳定性。

2. 真空控制

   • 调节腔体压力，实现沉积或刻蚀工艺所需的真空环境。

3. 工艺自动化

   • 与控制器联动，实现闭环调节，提高工艺重复性和一致性。

4. 设备安全保护

   • 防止流量异常或压力过高对设备和工艺造成影响。

AMAT Applied Materials  0100-35057气体面板 英文资料：

Product Overview

AMAT 0010-09035 throttle valve is a key fluid control component in Applied Materials semiconductor equipment, used to regulate the flow and pressure of process gases or vacuum systems. This valve can accurately adjust its opening according to the controller signal, achieving continuous flow control and optimizing the process conditions of deposition (CVD/PVD), etching (Etch) or other vacuum processes. It is an important component to ensure process stability and equipment safety.

Technical parameters (typical features)

Type: Throttle Valve

Function: Adjust gas or vacuum flow and pressure to achieve precise control

Control mode: Electrical or pneumatic control, can achieve closed-loop regulation with the controller

Interface type: standard flange or pipeline interface, suitable for process gas or vacuum systems

Work environment: cleanroom compatible, corrosion-resistant, high temperature resistant

Applicable media: process gases (such as N ₂, Ar, SiH ₄, etc.) and vacuum system gases

Compatible devices: Various deposition, etching, and vacuum process equipment from Applied Materials

Application scenarios

Process flow regulation

Accurately control the flow rate of process gas or vacuum system to ensure process stability.

vacuum control

Adjust the chamber pressure to achieve the vacuum environment required for deposition or etching processes.

PROCESS AUTOMATION

Linkage with the controller to achieve closed-loop regulation and improve process repeatability and consistency.

Equipment safety protection

Prevent abnormal flow or high pressure from affecting equipment and processes.

AMAT Applied Materials  0100-35057气体面板 产品展示      

 产品视频

3.其他产品

HORNER ELECTRIC HE693OIU907BY操作接口模块
Horner Electric HE693OIU177G操作员接口键盘
Horner Electric HE693DAC410A隔离分析输出模块 

4.其他英文产品

FBM224 P0926GG I / O module
IS200SPIDG1ABA combustion engine card
GE IS220PPRFH1B 336A5026ADP2 power supply module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218