AMAT Applied Materials 0010-08670顶盖
1.产 品 资 料 介 绍：
关键参数
性能特点
典型应用
AMAT Applied Materials 0010-08670顶盖 英文资料：
The top cover of AMAT Applied Materials 0010-08670 is a sealed end cover for semiconductor equipment vacuum chambers. The material is usually corrosion-resistant 5083 aluminum alloy, and the surface is treated with hard anodizing. It can work stably for a long time in an environment with a vacuum degree of 10 ⁻⁵ Pa at 0-40 ℃.
key parameters
Project specification remarks
Suitable for multi chamber platforms such as Centura, Endura, P5000, etc. to adapt to 200mm/300mm wafer processes
Material: 5083 aluminum alloy, corrosion-resistant, low stress, thermal expansion coefficient matched with the cavity
Surface treatment: Hard anodizing (inner side) film thickness meets SEMATECH standards
Sealing form: Metal sealing ring or fluororubber O-ring can withstand acid, alkali and plasma corrosion
Customized external dimensions, commonly ranging from Φ 800 to 1000 mm depending on the diameter of the cavity
Weight ≈ 80-150 kg, reduced by about 50% compared to stainless steel
Working temperature 0-40 ℃, recommended temperature control ± 2 ℃
Vacuum level 10 ⁻⁵ Pa leakage rate<1 × 10 ⁻⁹ mbar · L/s
Certification: SEMI S2, CE, UL comply with semiconductor industry safety standards
Performance Characteristics
High precision sealing: When the temperature fluctuates by ± 2 ℃, the deformation of the sealing surface is only about 0.01 mm, effectively extending the life of the sealing ring.
Low stress design: matched with the thermal expansion coefficient of the cavity material, reducing thermal cycling stress and preventing seal failure.
Strong corrosion resistance: The inner hard oxide layer can withstand process environments such as plasma, acid and alkali.
Easy to maintain: lightweight, supports quick replacement by two people, reduces downtime.
Typical Applications
Etch and CVD systems
Physical Vapor Deposition (PVD) and Atomic Layer Deposition (ALD) Systems
Ion implantation machine and wafer transfer chamber
AMAT Applied Materials 0010-08670顶盖 产品展示
产品视频
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
