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AMAT Applied Materials C190238压力传感器

发布时间:2025-09-26人气:
  • AMAT Applied Materials C190238压力传感器
  • AMAT Applied Materials C190238压力传感器
  • AMAT Applied Materials C190238压力传感器

AMAT Applied Materials C190238压力传感器

1.产 品 资 料 介 绍:

AMAT C190238 为应用材料公司定制的工业级压力传感器,用于半导体设备的真空、气体或液体压力测量,常见于 Centura、Endura、P5000 等平台的工艺腔室、真空系统或气体流量控制模块。

核心规格

项目规格 / 特点备注
类型压阻式硅微机械传感器可选绝压 / 表压 / 差压
测量范围0–15 psi、0–100 psi、真空至 1500 psi 等依设备型号而定
输出信号0–10 VDC、4–20 mA、0–100 mV 等可定制
精度±0.25% FS、±0.3% FS、±0.5% FS 可选补偿范围内
工作温度-25–90℃ 或 -40–125℃取决于封装与补偿
压力接口1/4"NPT、1/8" NPT、ISO-KF 等适配工艺管路
电气连接线缆直出、Packard 接头、MIL-DTL-5015 等抗干扰设计
封装316L 不锈钢或金属屏蔽抗振、防潮、耐腐蚀
应用真空度监测、气体流量控制、腔室压力调节射频电源、偏压电源、工艺模块

功能与价值

  • 高精度稳定测量:多层温度补偿与数字校准,长期漂移低
  • 宽量程适配:一套结构覆盖真空至高压应用
  • 抗干扰能力强:金属屏蔽与隔离设计,适应复杂电磁环境
  • 安全可靠:符合 IEC 61010、UL 508 等标准,可定制防爆型

选型与替代建议

  • 采购前需确认设备型号、模块位号及接口规格,避免因引脚定义或安装孔位不符导致无法使用。
  • 若原型号停产,可参考 AMAT 替代料号清单,确保量程、输出信号、接口尺寸及安装方式一致,并进行零点与满度校准。
  • 替代时应重点核对:
    • 压力量程与类型(绝压 / 表压 / 差压)
    • 输出信号类型与阻抗匹配
    • 接口尺寸与安装方式
    • 温度补偿范围与工作温度等级

AMAT Applied Materials  C190238压力传感器 英文资料:

AMAT C190238 is an industrial grade pressure sensor customized by Applied Materials for vacuum, gas, or liquid pressure measurement in semiconductor equipment. It is commonly used in process chambers, vacuum systems, or gas flow control modules on platforms such as Centura, Endura, and P5000.

Core specifications

Project specifications/characteristics remarks

Type of piezoresistive silicon micro mechanical sensor with optional absolute pressure/gauge pressure/differential pressure

The measurement range is 0-15 psi, 0-100 psi, vacuum to 1500 psi, etc., depending on the equipment model

Output signals such as 0-10 VDC, 4-20 mA, 0-100 mV, etc. can be customized

Accuracy within the optional compensation range of ± 0.25% FS, ± 0.3% FS, and ± 0.5% FS

Working temperature -25-90 ℃ or -40-125 ℃ depends on packaging and compensation

Pressure interface 1/4 "NPT, 1/8" NPT, ISO-KF and other compatible process pipelines

Electrical connection cable straight out, Packard connector, MIL-DTL-5015 and other anti-interference designs

Encapsulation of 316L stainless steel or metal shielding for vibration resistance, moisture resistance, and corrosion resistance

Application vacuum monitoring, gas flow control, chamber pressure regulation, RF power supply, bias power supply, process module

function and value

High precision stable measurement: multi-layer temperature compensation and digital calibration, low long-term drift

Wide range adaptation: a set of structures covering vacuum to high pressure applications

Strong anti-interference ability: metal shielding and isolation design, suitable for complex electromagnetic environments

Safe and reliable: Compliant with IEC 61010, UL 508 and other standards, customizable explosion-proof type

Selection and Alternative Suggestions

Before purchasing, it is necessary to confirm the equipment model, module tag number, and interface specifications to avoid being unable to use due to incorrect pin definitions or installation hole positions.

If the original model is discontinued, you can refer to the AMAT replacement part number list to ensure consistency in range, output signal, interface size, and installation method, and perform zero and full calibration.

When replacing, it is important to focus on checking:

Pressure range and type (absolute pressure/gauge pressure/differential pressure)

Output signal type and impedance matching

Interface size and installation method

Temperature compensation range and working temperature level

AMAT Applied Materials C190238压力传感器 产品展示      

c190238_gae_gerling_applied_engineering_magnetron_head_913630_1_8kw_2450mhz_1.jpg

 产品视频

3.其他产品

GJR2312200R1010数字 I/O 模块
GJR2385200R1010控制器模块
GJR2395400R1010 83SR06C-E控制板

4.其他英文产品

AMAT 0100-09156 Multi-function I/O card
AMAT 0100-09126 Serial control card
AMAT 0100-09117 Multi-function I/O card

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IC3600LIBA1531X144DRGAAG1IC3600AOAC1C
IC3600LGXA1A531X140CCHAYM2IC3600AOAC1
IC3600LGXA1531X140CCHATM2IC3600AOAB1
IC3600LFFA1531X140CCHASM2IC3600AOAA2D1
IC3600LFAA1531X140CCHANM2IC3600AOAA2B
IC3600LDEG1B531X140CCHAMM2IC3600AOAA2

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218

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