AMAT Applied Materials 0010-68129阀门组件
1.产 品 资 料 介 绍：
- 设备适配：匹配 AMAT 半导体工艺设备（如 CVD 沉积、蚀刻机台），用于真空腔室的气体 / 液体控制，适配反应气体输送、清洗液循环、真空抽排等管路系统。
- 工艺兼容：聚焦高洁净、高真空场景，适配 1×10⁻³ - 1×10⁻⁹ Pa 真空区间，兼容半导体制造中硅烷、氨气、氟化物等腐蚀性 / 易燃易爆气体，避免工艺污染。
- 核心功能：实现管路介质的精准通断与流量调节，配合设备主控系统控制介质输送时序，保障薄膜沉积、蚀刻等工序的工艺稳定性。
- 控制精度：阀门开度调节精度 ±2%，开关响应时间≤200ms，泄漏率≤1×10⁻⁹ Pa・m³/s（氦质谱检测），确保高真空环境下无介质泄漏，适配 3x 纳米制程要求。
- 结构性能：采用隔膜式密封结构（膜片材质为全氟橡胶 FFKM），耐温范围 - 20-200℃，耐压≤1.0MPa，长期使用无老化变形，使用寿命超 8000 次开关循环。
- 驱动方式：支持气动驱动（工作气压 0.4-0.8MPa），可通过 4-20mA 信号实现开度比例控制，适配 AMAT 设备 PLC 系统的远程调控需求。
- 防护设计：阀体采用 316L 不锈钢材质（表面粗糙度 Ra≤0.8μm），内壁经电解抛光处理，无颗粒残留，符合半导体 Class 1 洁净标准；外部配备防尘罩，适配洁净车间环境。
- 安装适配：采用卡套式 / 法兰式连接（接口规格 1/4"- 1/2"），支持管路快速拆装，适配设备内部紧凑空间，安装同轴度误差≤0.1mm，避免管路应力导致的密封失效。
- 维护便利：内置可拆卸过滤芯（孔径 5μm），可单独清洗更换；配备位置反馈传感器，通过 LED 指示灯显示阀门开关状态，便于快速排查卡滞、泄漏等故障。
AMAT Applied Materials 0010-68129阀门组件 英文资料：
1. Adaptation scenarios and functions (0010-68129)
Equipment adaptation: Matching AMAT semiconductor process equipment (such as CVD deposition and etching machines) for gas/liquid control in vacuum chambers, adapting to pipeline systems such as reaction gas transportation, cleaning solution circulation, and vacuum pumping.
Process compatibility: Focusing on high cleanliness and high vacuum scenarios, suitable for 1 × 10 ⁻³ -1 × 10 ⁻⁹ Pa vacuum range, compatible with corrosive/flammable and explosive gases such as silane, ammonia, fluoride, etc. in semiconductor manufacturing, avoiding process pollution.
Core function: Achieve precise on/off and flow regulation of pipeline media, cooperate with the equipment main control system to control the timing of media transportation, and ensure the process stability of thin film deposition, etching and other processes.
2. Accuracy and Performance (0010-68129)
Control accuracy: Valve opening adjustment accuracy ± 2%, switch response time ≤ 200ms, leakage rate ≤ 1 × 10 ⁻⁹ Pa · m ³/s (helium mass spectrometry detection), ensuring no medium leakage in high vacuum environment, suitable for 3x nanometer process requirements.
Structural performance: Adopting diaphragm type sealing structure (diaphragm material is perfluororubber FFKM), temperature resistance range -20-200 ℃, pressure resistance ≤ 1.0MPa, long-term use without aging deformation, service life exceeding 8000 switching cycles.
Drive mode: Supports pneumatic drive (working pressure 0.4-0.8MPa), can achieve opening ratio control through 4-20mA signal, suitable for remote control requirements of AMAT equipment PLC system.
3. Structure and Protection (0010-68129)
Protection design: The valve body is made of 316L stainless steel material (surface roughness Ra ≤ 0.8 μ m), and the inner wall is treated with electrolytic polishing, with no particle residue, meeting the semiconductor Class 1 cleanliness standard; Equipped with an external dust cover, suitable for clean workshop environment.
Installation and adaptation: Adopting sleeve/flange connection (interface specification 1/4 "-1/2"), supporting quick disassembly and assembly of pipelines, adapting to the compact space inside the equipment, with installation coaxiality error ≤ 0.1mm, avoiding sealing failure caused by pipeline stress.
Easy maintenance: Built in detachable filter element (pore size 5 μ m), can be cleaned and replaced separately; Equipped with position feedback sensors, the valve switch status is displayed through LED indicator lights, making it easy to quickly troubleshoot faults such as jamming and leakage.
AMAT Applied Materials 0010-68129阀门组件 产品展示
产品视频
3.其他产品
YOKOGAWA AQ6370C光谱分析仪
MP1200A5控制器模块
NI PXIE-5672信号发生器
4.其他英文产品
Honeywell SC-UCMX01 51307198-175 module
Honeywell SC-UCMX01 51307195-175 module
IDPG 940128102 Control card
| PMA22B-01100-22 | AMAT 0100-35279 | PFTL101A-1.0KN 3BSE004166R1 |
| PMA22B-01100-00 | AMAT 0100-77043 | PFTL 101AER-1.0KN |
| PMA22B-00100-00 | AMAT 0100-00060 | PFTL-101A 3BSE008508R1 |
| PMA21B-10100-00 | AMAT 0100-00059 | PFEA112-65 |
| PMA21B-01100-00 | ANAT 0100-76091 | PFRL101A |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
