AMAT Applied Materials 0100-01691高压气体联锁模块
1.产 品 资 料 介 绍：
- 设备适配：匹配 AMAT 半导体工艺设备（如 CVD 沉积、蚀刻机台）的高压气体管路系统，用于硅烷、氨气、氟化物等危险气体的安全管控，适配 300mm 晶圆制造的气体输送链路。
- 工艺兼容：聚焦高压气体（0.5-10MPa）的安全使用场景，兼容半导体薄膜沉积、等离子蚀刻等需高压气体参与的工序，可与设备气体控制柜、紧急切断系统联动。
- 核心功能：实现高压气体压力监测、泄漏检测与联锁保护，当气体压力异常或检测到泄漏时，自动触发阀门切断、声光报警，防止气体泄漏引发安全事故或工艺中断。
- 监测精度：压力测量范围 0-15MPa，测量误差≤±0.5% FS，压力分辨率 0.01MPa，可精准捕捉高压气体的微小压力波动；泄漏检测灵敏度≤1×10⁻⁶ Pa・m³/s（氦质谱校准）。
- 响应性能：压力采样频率≥5Hz，联锁动作响应时间≤50ms，支持 “压力超高 / 超低、流量异常、管路温度异常” 三重联锁触发条件，满足危险气体的快速安全管控需求。
- 信号兼容：支持 4-20mA 模拟量信号（压力数据输出）与 RS-485 数字信号（状态反馈），可接入 AMAT 设备 PLC 系统，实现远程压力监控与联锁参数配置。
- 防护设计：阀体与检测模块采用 316L 不锈钢材质（抗腐蚀等级≥9 级），表面经钝化处理；外壳防护等级 IP66，防粉尘、防高压喷淋清洗，内部电路具备防爆设计（ATEX II 2G）。
- 安装适配：采用法兰式 / 卡套式接口（接口规格 1/2"-1"），支持管路水平 / 垂直安装，适配设备气体管路的紧凑布局；接线端子带防爆密封套，避免气体渗入电路引发故障。
- 操作便利：配备 1.8 英寸 OLED 显示屏，实时显示气体压力、联锁状态、故障代码；支持通过物理按键本地设置压力阈值，也可通过专用软件远程调试，无需拆解模块。
AMAT Applied Materials 0100-01691高压气体联锁模块 英文资料：
1. Adaptation scenarios and functions (0100-01691)
Equipment adaptation: High pressure gas pipeline system compatible with AMAT semiconductor process equipment (such as CVD deposition and etching machines), used for safety control of hazardous gases such as silane, ammonia, fluoride, etc., and adapted for gas transport links in 300mm wafer manufacturing.
Process compatibility: Focusing on safe use scenarios of high-pressure gas (0.5-10MPa), compatible with processes such as semiconductor film deposition and plasma etching that require high-pressure gas participation, and can be linked with equipment gas control cabinets and emergency shutdown systems.
Core function: Implement high-pressure gas pressure monitoring, leak detection, and interlock protection. When gas pressure is abnormal or a leak is detected, the valve will automatically shut off and sound and light alarms will be triggered to prevent gas leakage from causing safety accidents or process interruptions.
2. Accuracy and Performance (0100-01691)
Monitoring accuracy: pressure measurement range 0-15MPa, measurement error ≤ ± 0.5% FS, pressure resolution 0.01MPa, can accurately capture small pressure fluctuations of high-pressure gases; Leakage detection sensitivity ≤ 1 × 10 ⁻⁶ Pa · m ³/s (helium mass spectrometry calibration).
Response performance: Pressure sampling frequency ≥ 5Hz, interlock action response time ≤ 50ms, supports triple interlock triggering conditions of "pressure ultra-high/ultra-low, flow abnormal, pipeline temperature abnormal", and meets the rapid and safe control requirements of hazardous gases.
Signal compatibility: Supports 4-20mA analog signals (pressure data output) and RS-485 digital signals (status feedback), and can be connected to AMAT equipment PLC system to achieve remote pressure monitoring and interlock parameter configuration.
3. Structure and Protection (0100-01691)
Protection design: The valve body and detection module are made of 316L stainless steel material (corrosion resistance level ≥ 9), and the surface has been passivated; The enclosure protection level is IP66, and it is dust-proof and high-pressure spray cleaning resistant. The internal circuit has explosion-proof design (ATEX II 2G).
Installation adaptation: adopts flange/sleeve interface (interface specification 1/2 "-1"), supports horizontal/vertical installation of pipelines, and adapts to the compact layout of equipment gas pipelines; The wiring terminals are equipped with explosion-proof sealing sleeves to prevent gas from infiltrating the circuit and causing faults.
Easy to operate: equipped with a 1.8-inch OLED display screen, real-time display of gas pressure, interlock status, and fault codes; Support setting pressure thresholds locally through physical buttons, and can also be remotely debugged through dedicated software without disassembling the module.
AMAT Applied Materials 0100-01691高压气体联锁模块 产品展示
产品视频
3.其他产品
LAM 839-019090-611静电夹
AMAT 0195-14329温度控制器
EMERSON OCX88C-12-10-0-0-H2-02-0-0 变频器
4.其他英文产品
PP825 3BSE042240R1 Touch screen
YASKAWA JANCD-XCP0101C-1 Control protection module
ANYBUS ABDT-PDP 3183203131 mechanical module
| PFCL201C/CD | AMAT 0100-90071 | ICS Triplex T8121 |
| PFCL201C | AMAT 0100-09006 | ICS Triplex |
| PFBL141B/C | AMAT 0100-20051 | T9300 |
| PETLI01A | AMAT 0100-35565 | ICS Triplex T8871 |
| PETL201 | AMAT 0100-38027 | MC-TAMT04 51305890-175 |
| PETL101B | AMAT 0100-71261 | MC-TAOY25 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
