AMAT Applied Materials 0100-01066离子体检测组件
1.产 品 资 料 介 绍：
- 设备适配：匹配 AMAT 半导体等离子体工艺设备（如干法蚀刻机、PECVD 沉积机台），用于真空腔室内等离子体状态的实时监测，适配 300mm 晶圆制造的蚀刻、薄膜沉积工序。
- 工艺兼容：聚焦射频等离子体（13.56MHz/27.12MHz 常用频段）检测场景，兼容硅、金属、介电质等不同晶圆材料的等离子体加工工艺，可与设备射频电源、腔室控制系统联动。
- 核心功能：实现等离子体密度、电子温度、离子能量等关键参数的精准检测，当参数偏离工艺阈值时触发报警，保障蚀刻速率均匀性、薄膜沉积质量，避免晶圆报废。
- 检测精度：等离子体密度测量范围 10⁹-10¹² cm⁻³，误差≤±5%；电子温度测量范围 0.5-5eV，误差≤±0.1eV；离子能量分辨率 0.1eV，可捕捉等离子体微小参数波动。
- 响应性能：参数采样频率≥10Hz，数据输出延迟≤100ms，支持 “实时监测 + 历史数据存储” 双模式，存储容量可记录≥72 小时工艺参数，便于工艺追溯与异常分析。
- 信号兼容：支持以太网（100Mbps）、RS-485 数字信号输出，可接入 AMAT 设备 PLC 系统与 SmartFactory 良率管理平台，实现等离子体参数的远程监控与工艺配方优化。
- 防护设计：检测探头采用氧化铝陶瓷绝缘外壳（耐等离子体腐蚀寿命≥5000 小时），探头表面经 Y₂O₃涂层处理；主体模块防护等级 IP65，防粉尘、防车间清洁泼溅，内部电路具备抗电磁干扰（EMI）设计。
- 安装适配：采用法兰式安装（适配 DN40/DN50 标准真空法兰），可直接嵌入腔室侧壁，探头伸入深度可调（0-50mm），适配不同尺寸腔室的等离子体分布区域；接线端子带真空密封设计（漏率≤1×10⁻⁹ Pa・m³/s）。
- 操作便利：配备 2.0 英寸 LCD 显示屏，实时显示等离子体核心参数与模块工作状态；支持通过物理按键本地校准探头，也可通过专用软件远程更新固件，无需拆解腔室。
AMAT Applied Materials 0100-01066离子体检测组件 英文资料：
1. Adaptation scenarios and functions (0100-01066)
Equipment adaptation: Matched with AMAT semiconductor plasma process equipment (such as dry etching machine, PECVD deposition machine), used for real-time monitoring of plasma state in vacuum chambers, suitable for etching and thin film deposition processes in 300mm wafer manufacturing.
Process compatibility: Focusing on RF plasma (commonly used frequency bands of 13.56MHz/27.12MHz) detection scenarios, compatible with plasma processing processes of different wafer materials such as silicon, metal, and dielectric, and can be linked with equipment RF power supply and chamber control system.
Core function: Accurate detection of key parameters such as plasma density, electron temperature, and ion energy. When the parameters deviate from the process threshold, an alarm is triggered to ensure the uniformity of etching rate, film deposition quality, and avoid wafer scrap.
2. Accuracy and Performance (0100-01066)
Detection accuracy: Plasma density measurement range is 10 ⁹ -10 ¹² cm ⁻ ³, with an error of ≤± 5%; The electronic temperature measurement range is 0.5-5eV, with an error of ≤± 0.1eV; the ion energy resolution is 0.1eV, which can capture small fluctuations in plasma parameters.
Response performance: Parameter sampling frequency ≥ 10Hz, data output delay ≤ 100ms, supports "real-time monitoring+historical data storage" dual-mode, storage capacity can record process parameters for ≥ 72 hours, facilitating process traceability and anomaly analysis.
Signal compatibility: Supports Ethernet (100Mbps), RS-485 digital signal output, and can be connected to AMAT equipment PLC system and SmartFactory yield management platform to achieve remote monitoring of plasma parameters and process formulation optimization.
3. Structure and Protection (0100-01066)
Protection design: The detection probe adopts an aluminum oxide ceramic insulation shell (with a plasma corrosion resistance life of ≥ 5000 hours), and the probe surface is treated with Y ₂ O3 coating; The main module has a protection level of IP65, which is dust-proof and workshop cleaning splash proof. The internal circuit is designed to resist electromagnetic interference (EMI).
Installation adaptation: Adopting flange installation (compatible with DN40/DN50 standard vacuum flanges), it can be directly embedded into the chamber side wall, and the probe can be inserted into the depth adjustable (0-50mm) to adapt to the plasma distribution area of different sizes of chambers; The wiring terminal is designed with vacuum sealing (leakage rate ≤ 1 × 10 ⁻⁹ Pa · m ³/s).
Easy to operate: equipped with a 2.0-inch LCD display screen, real-time display of plasma core parameters and module working status; Support local calibration of probes through physical buttons, and remote firmware updates through dedicated software without disassembling the chamber.
AMAT Applied Materials 0100-01066离子体检测组件 产品展示
产品视频
3.其他产品
AMAT 0195-14329温度控制器
EMERSON OCX88C-12-10-0-0-H2-02-0-0 变频器
MKS AX7670-60 发电机
4.其他英文产品
ANYBUS ABDT-PDP 3183203131 mechanical module
EMBEDDED EPCDFBA#219 B2 Robot module
EMBEDDED EPCPCRA#136 B5 Robot module
| PCE845-XYZ-F | AMAT 0100-09068 | MC-TAMR03 |
| PCE845-XYZ-A | AMAT 0100-03378 | MC-TAIH14 |
| PCE843-001-T | AMAT 0100-20335 | MC-TAIH13 |
| PCE843-001-N | 6134-6SC71-7 | MC-TAIH12 |
| PCE843-001-F | 6SC6620-0AA01 | MC-TAIH04 |
| PCE843-001-A |  6SC6100-0GC10 | MC-TAIH23 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
