AMAT Applied Materials 0020-04129顶部铰链支架
1.产 品 资 料 介 绍:
- 工艺设备腔体防护:用于光刻、刻蚀设备的真空腔体门盖铰链固定,通过精准的轴心定位确保门体与腔体的密封贴合,避免工艺气体泄漏与外部颗粒侵入。
AMAT Applied Materials 0020-04129顶部铰链支架 英文资料:
1、 Product positioning and core values
The top hinge bracket of AMAT 0020-04129 serves as the original core structural component of Applied Materials semiconductor equipment, providing rigid support for the hinge system of the upper chamber door cover and maintenance port of the equipment. In the high-frequency operation scenarios of semiconductor manufacturing, it not only undertakes the basic functions of hinge load-bearing and opening and closing torque transmission, but also ensures the sealing and positioning accuracy of door closure through precision structural design. It is a key component to avoid particle pollution caused by mechanical looseness and reduce the risk of equipment shutdown.
2、 Core technical characteristics and process specifications
Technical dimension
Specific parameters and implementation details
Component Attributes
High precision mechanical fixed bracket, suitable for modular assembly requirements of semiconductor equipment hinge systems
Installation and positioning
The upper hinge integration area of the equipment is aligned coaxially with the rotation axis of the door cover, and the installation reference error is ≤ 0.1mm
Core functions
Hinge support, torque bearing, positioning calibration, capable of withstanding mechanical stress impact of ≥ 100000 opening and closing cycles
Material system
The main body is made of 304/316L stainless steel (chromium ≥ 18%, nickel ≥ 8%) or high-strength aluminum alloy, and some high-end models use titanium alloy composite structure
Surface technology
After chromium free passivation and electrolytic polishing treatment (Ra ≤ 0.8 μ m), salt spray testing for 500 hours without red rust, suitable for chemical corrosion environment in clean rooms
Fixed mechanism
Using a combination of coarse thread screws and serrated washers for fixation, coupled with hinge pins for coaxial positioning, anti vibration loosening design has passed 10-2000Hz vibration testing
3、 Scene adaptation and performance advantages
1. Adaptation to Semiconductor Core Scenarios
Process equipment chamber protection: used for fixing the hinge of the vacuum chamber door cover of lithography and etching equipment, ensuring the sealing fit between the door body and the chamber through precise axis positioning, avoiding process gas leakage and external particle invasion.
AMAT Applied Materials 0020-04129顶部铰链支架 产品展示
产品视频
3.其他产品
DANAHER ZMP-SYNQNET-PCI 运动控制模块
SOCAPEL SOCASIN ST1/25-310 交流电伺服器
AUTOMATION 5AC600.FLAP-K11插槽接口模块
4.其他英文产品
WOODWARD 8440-1713 D Control the governor
TRICONEX EPI3382 Control card
ICS TRIPLEX 9100 base
6RA2190-4DV60-6DB0-ZA07 | 03-166293-00 | F31X139APMALG2 |
6RA2190-4DV60-4JB0-ZA07 | 193X803BGG03 | F31X100CCHBCG1 |
6RA2116-6DV60-6DB0-ZA07 | 531X112PSAAMG1 | F31X134EPRBDG1 |
-6GC11 | 193X803BEG03 | F31X134EPRBAG1 |
6ES5998-8MB22 | 531X116SHAAAG1 | 531X308PCSAEG3 |
6ES5998-8MA12 | 531X102CCHAEM1 | 740-689986-002 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218